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Laboratory Spin and Spray Coaters

www.suss.com

 
Suss MicroTec supplies Mask Aligners, Spray Coaters, Spin Coaters, Substrate Bonders, Flip Chip Bonders and Substrate Probers with a focus on both research  and university work as well as the semi-conductor industry.

With over 50 years experience and sales and service centres worldwide, Suss is the no.1 choice for specialized, innovative equipment to meet the demands of cutting edge research and production. 

Download Suss Delta80 Brochure

SPIN COATER Suss Delta80 (up to 8")

bulletpatented GYRSET technology provides very uniform coating with minimized resist waste (by up to 60%) especially with thick resists
bulletGYRSET gives unsurpased results with wafer pieces or square substrates
bulleteasy exchange system for swapping substrate sizes
bulleteasy cleaning and maintenance (whole bowl can be easily removed)
bulletspin speed from 1 to 10,000 rpm
bulletmany options for type of dispense system (pressurized tank, syringe, pump)
bulletable to connect pc to allow unlimited recipes and easier recipe editing
bulletchucks available for single or double side coating (or adaptors for pieces)
bulletedge bead remover (optional)
bulletcotton candy remover (optional)
bulletsolvent dispense nozzle (cleaning or developing)
bulletbowl auto clean (option)

Key Benefits

bulletresist savings of up to 60%
bulletvery uniform and repeatable coatings
bulletmany options for every resist type and application

SPRAY COATER Suss Altaspray (up to 8")

bulletprogrammable spray pattern
bulletable to spray uniform coatings over severe substrate topographies
bulletideal for coating MEMS (Micro Electro Mechanical System)

For more information contact us at sales@coltronics.com.au

 

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Last modified: 06/05/09