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Production Spin/Spray Coat/Bake/Develop Equipment

www.suss.com

Suss MicroTec supplies Mask Aligners, Spray Coaters, Spin Coaters, Substrate Bonders, Flip Chip Bonders and Substrate Probers with a focus on both research and university work as well as the semi-conductor industry.

With over 50 years experience and sales and service centres worldwide, Suss is the no.1 choice for specialized, innovative equipment to meet the demands of cutting edge research and production. 

SPIN COATER Suss Gamma80 (up to 8")

bulletfully automated wafer preparation, coating, baking and developing tool
bulletpatented GYRSET technology provides very uniform coating with minimized resist waste (by up to 60%) especially with thick resists
bulletGYRSET gives unsurpased results with wafer pieces or square substrates
bulleteasy exchange system for swapping substrate sizes
bulleteasy cleaning and maintenance (whole bowl can be easily removed)
bulletspin speed from 1 to 10,000 rpm
bulletmany options for type of dispense system (pressurized tank, syringe, pump)
bulletable to connect pc to allow unlimited recipes and easier recipe editing
bulletmodular design allows for numerous variations of hot/cool plates, HCV surface prep chamber
bulletup to 3 spinners (coating or developing) and hot/cool plate stack (4 units) possible
bulletchucks available for single or double side coating (or adaptors for pieces)
bulletedge bead remover (optional)
bulletcotton candy remover (optional)
bulletsolvent dispense nozzle (cleaning or developing)
bulletbowl auto clean (option)

Key Benefits

bulletresist savings of up to 60%
bulletvery uniform and repeatable coatings
bulletmany options for every resist type and application

For more information contact us at sales@coltronics.com.au

 

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Last modified: 06/05/09