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Laboratory Mask Aligners

www.suss.com


Suss MicroTec supplies Mask Aligners, Spray Coaters, Spin Coaters, Substrate Bonders, Flip Chip Bonders and Substrate Probers with a focus on both research  and university work as well as the semi-conductor industry.

With over 50 years experience and sales and service centres worldwide, Suss is the no.1 choice for specialized, innovative equipment to meet the demands of cutting edge research and production. 

Download Suss MA/BA6 Brochure

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MASK ALIGNER Suss MA/BA8 (up to 8") or Suss MA/BA6 (up to 6") or MJB4 (up to 4")

bulletindustry leading Mask Aligners
bullettop side split-field microscope (or optional dual video microscope)
bulletchoice of exposure optics and filters (with specialty optics for different wavelengths and thick resist applications)
bulletDiffraction Reduction Lens system improves sidewall profile especially with thick resist applications.
bulletfine vernier controlled manual alignment stage in X,Y and Theta (optional motorized alignment available)
bulletaccurate to 1um alignment and exposure distances between mask and wafer
bulletwafer planarity acheivable with either contact or proximity leveling (WEC) system
bulletfeedback controller for light intensity is standard
bulletconfigurable for 1500W, 1000W, 350W or 200W lamps
bulletback side alignment (BSA) microscopes (optional)
bulletIR alignment (optional)
bulletunder 5 minute conversion to Bond Aligner (optional)
bulletable to be fitted for Near Field Holography applications such as filter gratings (optional)   

Key Benefits

bulletPattern Resolution to <0.4u possible (under control conditions)
bulletAble to be used as both Mask Aligner and Bond Aligner
bulletSuss tool is scalable to production tool.

For more information contact us at sales@coltronics.com.au

 

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Last modified: 06/05/09