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Production Mask Aligners

www.suss.com

Suss MicroTec supplies Mask Aligners, Spray Coaters, Spin Coaters, Substrate Bonders, Flip Chip Bonders and Substrate Probers with a focus on both research and university work as well as the semi-conductor industry.

With over 50 years experience and sales and service centres worldwide, Suss is the no.1 choice for specialized, innovative equipment to meet the demands of cutting edge research and production. 

MASK ALIGNER Suss MA300+ (up to 12") or MA200Compact (up to 8") or MA200CC or MA150CC (up to 6")

bulletindustry leading fully automatic Mask Aligners
bullettop side dual video microscope (IR cameras available as an option)
bulletchoice of exposure optics and filters (with specialty optics for different wavelengths and thick resist applications)
bulletDiffraction Reduction Lens system improves sidewall profile especially with thick resist applications.
bulletstepper motor  controlled alignment and microscope stages in X,Y and Theta (enables sub micron alignment accuracy)
bulletaccurate to 1um alignment and exposure distances between mask and wafer
bulletwafer planarity achievable with either contact or proximity leveling (WEC) system
bulletfeedback controller for light intensity is standard
bulletconfigurable for 1500W, 1000W, 350W or 200W lamps
bulletback side alignment (BSA) microscopes (optional)
bulletIR alignment (optional)

Key Benefits

bulletPattern Resolution to <0.4u possible (under control conditions)
bulletFully automated cassette to cassette operation
bulletCognex Patmax target aquisition and alignment system
bulletFine-align feature (optional) allows for alignment check at exposure position position with targets overlayed
bulletFull wafer exposured in one step
bulletHigh throughput (compared to comparable stepper)
bulletLow cost of ownership (compared to comparable stepper)

For more information contact us at sales@coltronics.com.au

 

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Copyright © 2007 Coltronics Systems Pty Ltd
Last modified: 06/05/09